JPH0187172U - - Google Patents
Info
- Publication number
- JPH0187172U JPH0187172U JP18407487U JP18407487U JPH0187172U JP H0187172 U JPH0187172 U JP H0187172U JP 18407487 U JP18407487 U JP 18407487U JP 18407487 U JP18407487 U JP 18407487U JP H0187172 U JPH0187172 U JP H0187172U
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- holder
- pins
- substrate support
- support
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 11
- 230000002093 peripheral effect Effects 0.000 claims description 3
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18407487U JPH0187172U (en]) | 1987-12-02 | 1987-12-02 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18407487U JPH0187172U (en]) | 1987-12-02 | 1987-12-02 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0187172U true JPH0187172U (en]) | 1989-06-08 |
Family
ID=31475460
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18407487U Pending JPH0187172U (en]) | 1987-12-02 | 1987-12-02 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0187172U (en]) |
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1987
- 1987-12-02 JP JP18407487U patent/JPH0187172U/ja active Pending